JPH0336028Y2 - - Google Patents
Info
- Publication number
- JPH0336028Y2 JPH0336028Y2 JP14981885U JP14981885U JPH0336028Y2 JP H0336028 Y2 JPH0336028 Y2 JP H0336028Y2 JP 14981885 U JP14981885 U JP 14981885U JP 14981885 U JP14981885 U JP 14981885U JP H0336028 Y2 JPH0336028 Y2 JP H0336028Y2
- Authority
- JP
- Japan
- Prior art keywords
- gap
- inductively coupled
- coupled plasma
- ions
- mass spectrometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 150000002500 ions Chemical class 0.000 claims description 19
- 238000009616 inductively coupled plasma Methods 0.000 claims description 13
- 239000012212 insulator Substances 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims description 2
- 239000010979 ruby Substances 0.000 claims description 2
- 229910001750 ruby Inorganic materials 0.000 claims description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 238000001514 detection method Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 238000001228 spectrum Methods 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 239000006199 nebulizer Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 108010083687 Ion Pumps Proteins 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14981885U JPH0336028Y2 (en]) | 1985-09-30 | 1985-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14981885U JPH0336028Y2 (en]) | 1985-09-30 | 1985-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6258855U JPS6258855U (en]) | 1987-04-11 |
| JPH0336028Y2 true JPH0336028Y2 (en]) | 1991-07-31 |
Family
ID=31065383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14981885U Expired JPH0336028Y2 (en]) | 1985-09-30 | 1985-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0336028Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3521218B2 (ja) * | 1997-07-04 | 2004-04-19 | 独立行政法人産業技術総合研究所 | 金属−絶縁性セラミック複合サンプラー及びスキマー |
-
1985
- 1985-09-30 JP JP14981885U patent/JPH0336028Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6258855U (en]) | 1987-04-11 |
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